Expensive components, manufactured in small batches: replenishing areas eroded by plasma, under very strict cleanliness requirements.
These internal components of plasma etching or deposition equipment (PVD, CVD) are subject to severe erosion and corrosion when exposed to plasma and reactive gases (fluorinated, chlorinated), which are concentrated in the areas directly exposed, while the overall structure of the chamber remains intact.
DED enables these eroded areas to be locally rebuilt or coated with alloys resistant to plasma corrosion (Inconel, special alloys), thereby extending the service life of costly components manufactured in small batches specific to each equipment manufacturer.
This repair process is subject to very strict cleanliness and particulate control requirements (no metallic contamination for cleanroom processes), which necessitates extensive qualification before implementation. The economic stakes are high given the high cost of these small-batch machined parts and the sometimes lengthy manufacturing lead times for specific equipment manufacturers.
